NEW PRODUCTS

SELFA TRIOBLOC for UHP source gas

Applications

Delivery of Ultra High Purity source gas from cylinder to process for semiconductor application.

Features and Benefits

• Minimized gas wetted volume of 1.3 cm³
• Minimized downtime during cylinder changeover
• Reduced contamination and leaks due to compact block design
• Large savings on purge and process gas used during changeover
• Robust design due to proven tied diaphragm valve tech
• Simplification of the overall gas cabinet system

SMT Gas Point of Use MSL40 & MSI40

Ultra-compact monobloc gas point of use

• For laboratories, analysis and sampling
• Horizontal or vertical mounting
• Max. 50 bar inlet pressure
• Outlet pressure 0.1-10 bar (0.1-1.5 bar AD version)
• For use with laboratory gases, acetylene (AD version) or slightly corrosive gases (MSI40)
• Gas purity up to 6.0
• Flow rate from 1m³/h C₂H₂ to 3.5m³/h N₂